❤️ Wafer Stress Calculation

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1
https://lnf-wiki.eecs.umich.edu/wiki/Thin_film_stress_measurement
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2
https://www.kla.com/wp-content/uploads/KLA_AppNote_Stylus_2D_Stress.pdf
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3
https://thesis.library.caltech.edu/2451/1/Full_thesis_v3_FINAL.pdf
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4
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5
https://www.sciencedirect.com/topics/engineering/stoney-equation
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6
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7
https://www.researchgate.net/figure/Flow-chart-illustrating-calculation-of-local-stress-from-wafer-shape-measurements_fig2_260309298
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8
https://asmedigitalcollection.asme.org/appliedmechanics/article/87/10/101006/1084677/Determination-of-Stresses-in-Incrementally
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9
https://hal.archives-ouvertes.fr/hal-01058720/document
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10
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11
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12
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13
https://louisville.edu/micronano/files/documents/standard-operating-procedures/Toho_SOP.pdf
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14
https://repository.upenn.edu/cgi/viewcontent.cgi?article=1038&context=scn_protocols
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15
https://iopscience.iop.org/article/10.1088/2053-1591/aa71ed/pdf
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16
https://www.memsolver.com/Help/html/wfrbow.htm
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17
https://arxiv.org/pdf/1110.4727
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18
https://www.toray-research.co.jp/en/technicallineup/pdf/P01494_Internal_stress_measurement_of_thin_film.pdf
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19
https://ieeexplore.ieee.org/document/7954277
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20
https://briefs.techconnect.org/wp-content/volumes/Nanotech2011v2/pdf/1460.pdf
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21
https://imechanica.org/files/353%20Class%20Notes%202005.pdf
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22
https://eng.libretexts.org/Bookshelves/Materials_Science/TLP_Library_I/11%3A_Coating_mechanics/11.05%3A_Section_5-
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23
https://www.mdpi.com/2075-1702/9/11/284/htm
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24
https://cse.umn.edu/mnc/film-stress-measurement-fsm
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25
https://www.preprints.org/manuscript/202010.0594/v1/download
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26
https://www.chegg.com/homework-help/questions-and-answers/calculate-wafer-bow-thin-film-100-nm-thick-100mpa-stress-induces-silicon-wafer-675-m-thick-q33120571
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27
http://www-inst.eecs.berkeley.edu/~ee143/fa10/lectures/Lec_24.pdf
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28
https://worldwidescience.org/topicpages/w/wafer+curvature+measurements.html
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29
https://www.ectc.net/files/68/2018-Best-IP-Paper.pdf
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30
https://www.k-space.com/wp-content/uploads/MOSforThinFilms.pdf
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31
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32
https://home.iitm.ac.in/ratna/publications/Ratna_TSF_2016.pdf
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33
https://www.cnfusers.cornell.edu/node/87
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34
https://www.linkedin.com/pulse/how-wafer-stress-measurement-can-enhance-yield-mo-alam?trk=public_profile_article_view
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35
https://www.nnin.org/sites/default/files/2015_REU/2015NNINreuRA_PDFs/2015NNINreuRA_Soucy.pdf
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36
https://groups.seas.harvard.edu/hutchinson/papers/462-5.pdf
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37
https://go.gale.com/ps/i.do?id=GALE%7CA697623616&sid=googleScholar&v=2.1&it=r&linkaccess=abs&issn=10637842&p=AONE&sw=w
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38
https://pml.nist.gov/test-structures/MEMSCalculator.htm
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39
https://digitalcommons.usf.edu/cgi/viewcontent.cgi?article=1557&context=etd
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40
https://cleanroom.utdallas.edu/manuals/thin-film-stress-instrument/
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41
https://www.techscience.com/cmc/v68n1/41857/html
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42
https://tohotechnology.com/industries/wet-process/wafer-cleaning/
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43
https://dr.ntu.edu.sg/bitstream/10356/46439/1/TmG0301928E.pdf
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44
https://qd-europe.com/hu/en/product/flx-flexus-thin-film-stress-measurement-systems/
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45
https://smartech.gatech.edu/bitstream/handle/1853/26538/brun_xavier_f_200812_phd.pdf
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46
https://mtiinstruments.com/applications/wafer-bow-and-warp/
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47
https://www.scientific.net/MSF.717-720.501
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48
https://www.osti.gov/pages/servlets/purl/1474127
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49
https://patents.google.com/patent/US9779202B2/en
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50
https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9330259/
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51
https://opg.optica.org/abstract.cfm?uri=oe-27-19-27202
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52
https://www.orbotech.com/imgs/uploads/a-Downloads/EMPC%202013%20-%20KCrook_Buchanan%20EMPC-2013%20paper.pdf
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53
https://mnfu.technion.ac.il/film-stress-measurement-tencor-flx-2320/
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54
https://coral.nanofab.utah.edu/lab/equipment/download_file/Film+Stress+Tencor+FLX-2320/public/Spec+Sheet/Film+stress+Tencor+FLX2320+Spec+Sheet.pdf/Film+stress+Tencor+FLX2320+Spec+Sheet.pdf.pdf
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55
https://core.ac.uk/download/pdf/154467174.pdf
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56
https://xdocs.tips/doc/an516-dektak-stress-measure-eqnj27mx79o6
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57
https://www.manualslib.com/manual/1308532/Kla-Tencor-P-16Plus.html?page=297
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58
https://www.semanticscholar.org/paper/Si(004)-measurements-of-wafer-curvature-due-to-the-Nistala-Zhu/be0b0e466a41221ed1391a8b25a2edeab1382ed9
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59
https://www.renesas.com/us/en/document/qsg/calculation-semiconductor-failure-rates
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60
https://onlinelibrary.wiley.com/doi/full/10.1002/pssa.200409058
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61
https://journals.iucr.org/j/issues/2022/04/00/vb5039/vb5039.pdf
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62
https://www.ipme.ru/e-journals/MPM/no_12114/MPM121_03_dong.pdf
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63
https://www.x-mol.com/paper/oa/url?paperId=1464709185183580160&host=doi.org&type=HTML
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64
https://staff.bath.ac.uk/msscrb/waferbow.pdf
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65
https://www.ymsmagazine.com/wp-content/uploads/79711U.pdf
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66
https://publicaties.ecn.nl/PdfFetch.aspx?nr=ECN-RX--06-032
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67
https://www.spiedigitallibrary.org/journals/Journal-of-MicroNanolithography-MEMS-and-MOEMS/volume-12/issue-04/043002/Characterization-of-wafer-geometry-and-overlay-error-on-silicon-wafers/10.1117/1.JMM.12.4.043002.pdf
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68
https://cyberleninka.org/article/n/972132
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69
https://semiengineering.com/die-to-die-stress-becomes-a-major-issue/
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70
https://en.wikipedia.org/wiki/Residual_stress
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71
https://www.cambridge.org/core/services/aop-cambridge-core/content/view/C569B6E94A5EA7E85F90DF10FEE00208/S1946427400370415a.pdf/thermal-stresses-in-passivated-alsicu-lines-from-wafer-curvature-measurement.pdf
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72
https://digitalcommons.njit.edu/cgi/viewcontent.cgi?article=2339&context=theses
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73
https://fenix.tecnico.ulisboa.pt/downloadFile/395142119510/46722_Tese_MEFT.pdf
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74
https://www.quatek.com.cn/Public/Uploads/uploadfile/files/20180409/20180409093231_5acac2af33d1e.pdf
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75
https://pubs.acs.org/doi/10.1021/acsomega.2c02122
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76
https://www.dynatex.com/docs/scribe-and-break/The_Back-End_Process_-_Scribe_and_Break.pdf
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77
https://www.tu-chemnitz.de/physik/PHFK/LEHRE/Script%204_2010.pdf
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78
https://www.london-nano.com/sites/default/files/u29/34.%20Stress%20Control%20of%20Si-based%20PECVD%20Dielectrics.pdf
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79
https://elib.uni-stuttgart.de/bitstream/11682/1425/1/Mechanisms_of_intrinsic_stress_formation_in_thin_film_systems.pdf
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80
https://transducer-research-foundation.org/technical_digests/HiltonHead_2000/hh2000_0316.pdf
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81
http://www.rezaghodssi.com/sites/default/files/publications/1993-2002/2001-141.Residual-stress-and-fracture-in-tetraethylor.pdf
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82
https://www.hindawi.com/journals/amse/2017/4903924/
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83
https://ufdcimages.uflib.ufl.edu/AA/00/06/72/64/00001/Pflanzer_A_Thesis.pdf
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84
https://classoneequipment.com/product/kla-tencor-flx-2320-film-stress-measurement-system-2/
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85
https://siliconsemiconductor.net/article/95474/Role_of_process-induced_wafer_geometry_changes_in_advanced_semiconductor_manufacturing
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86
https://www.academia.edu/1804508/Thin_films_stress_extraction_using_micromachined_structures_and_wafer_curvature_measurements
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87
https://www.physicsforums.com/threads/how-to-calculate-maximum-surface-pressure-a-silicon-wafer-can-withstand.772574/
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88
http://mdl.pme.nthu.edu.tw/NTHU_PME_lab_ENG/papers/5.pdf
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89
https://www.research.ed.ac.uk/en/publications/development-of-an-advanced-system-for-automated-200-mm-wafer-mapp
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90
https://www.youtube.com/watch?v=lmwjPjvfVMg
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91
http://www.u.arizona.edu/~deymier/deymier_group/refs/mega4.pdf
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92
https://www.stresstech.com/stresstech-bulletin-12-measurement-methods-of-residual-stresses/
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93
https://www.iue.tuwien.ac.at/phd/singulani/dissse17.html
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94
https://www.leica-microsystems.com/science-lab/characterization-of-thin-films-using-high-definition-confocal-microscopy/
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